有滞留时间约束的两集束型装备调度模型  

Scheduling Model of Two-cluster Tools with Residency Time Constraints

作　　者：李林瑛[1] 卢睿 邹咏楠 LI Lin-ying LU Rui ZOU Yong-nan(School of Software, Dalian University of Foreign Languages, Dalian 116044, China Police Information Department, Liaoning Police College, Dalian 116036, China)

机构地区：[1]大连外国语大学软件学院,辽宁大连116044 [2]辽宁警察学院公安信息系,辽宁大连116036

出　　处：《数学的实践与认识》2017年第5期179-189,共11页Mathematics in Practice and Theory

基　　金：辽宁省教育厅科学研究一般项目(L2015137;L2014011;L2014455;L2014456);辽宁省大学生创新创业训练计划项目(201610172000015)

摘　　要：针对有滞留时间约束和并行加工的两集束型装备调度问题,分别推导了三类不等式约束条件,包括加工模块处于加工和空闲两种状态下的滞留时间约束、任意单个和两个搬运作业情况下的机械手搬运能力约束,以及缓冲模块能力约束,从理论上证明了并行加工模块等价加工时间的合理性,建立了以最小化生产周期为目标的混合整数规划模型.随机算例和基准算例的仿真结果验证了模型的可行性和有效性.The scheduling problem of cluster tools with residency time constraints and parallel processing is addressed.Three kinds of inequality constraints,including residency time constraints when processing module is either empty or occupied,robots capacity constraints in the condition of any single move and two consecutive moves,and capacity constraints of buffer module,are deduced respectively.The rationality of equivalent processing time for parallel process module is theoretically proved.A mixed integer programming model with object of minimized cycle time is constructed.At last,the simulation results from random examples and numerical example show the feasibility and effectiveness of the proposed model.

关 键 词：两集束型装备 半导体制造 调度模型 滞留时间约束 并行加工模块 

分 类 号：TN305[电子电信—物理电子学] O221.4[理学—运筹学与控制论]