等刚度高灵敏探头弹性机构设计  

Design of the Elastic Mechanism for a High-sensitive Probe

作　　者：周斌[1] 王鹏宇[2] 陈晶[1] 张雅雯[1] 李瑞君[2] 

机构地区：[1]安徽电气工程职业技术学院,合肥230051 [2]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《齐鲁工业大学学报》2017年第1期55-58,共4页Journal of Qilu University of Technology

基　　金：安徽省高校自然科学研究重点项目(KJ2015A410);安徽电气工程职业技术学院重点科研项目(2015zdxm06;2015zdxm05)

摘　　要：针对微型和小型元件的测量问题,设计了一种微纳米三坐标测量机的接触式探头高灵敏弹性机构。弹性机构由铍铜合金簧片、铝合金悬浮片、钢混合玻璃纤维探针以及红宝石测球构成。当测球与被测物体接触时,簧片产生弹性形变,根据弹性理论对弹性机构进行分析并对尺寸进行优化设计,得出弹性机构的刚度可以达到0.110 m N/μm以下。最后通过ANSYS软件对弹性机构进行仿真验证,分析结果的正确性并得出结论。To measure the micro and small components, higher sensitivity contact probe for CMM has been designed.Elastic mechanism is composed of some beryllium copper alloy leaves ,floating plate, stylus and Ruby ball. When the balls were in contact with the measured object, the leaf springs elastically deformed.The size design was optimized and analyzed based on elasticity theory of elastic bodies; the stiffness of the elastic is obtained 0. 110 mN/μm. Finally, the optimized structures were simulated by ANSYS software, the correctness of the results was analyzed and the conclusion was obtained.

关 键 词：弹性机构 微纳米三坐标测量机 刚度 

分 类 号：TH122[机械工程—机械设计及理论]