氧含量对磁控溅射Nb掺杂TiO_2薄膜结构与性能的影响  

Influence of Oxygen Concentration on Properties of Magnetron Sputtered Nb-Doped TiO_2 Coatings

作　　者：辛荣生[1] 林钰[2] 董林[1] 苏雷生 

机构地区：[1]郑州大学材料科学与工程学院,郑州450001 [2]河南教育学院化学系,郑州450014

出　　处：《真空科学与技术学报》2017年第3期255-259,共5页Chinese Journal of Vacuum Science and Technology

基　　金：河南省科技攻关项目资助(142102210068)

摘　　要：采用三靶磁控共溅射法在玻璃衬底上制备了Nb掺杂TiO_2透明导电薄膜。研究了在不同氧含量时薄膜的结构和光电性能。实验结果表明:氧含量的变化能改变Nb掺杂TiO_2薄膜晶体的晶粒尺寸、表面形貌、透光率和电阻率,当溅射氩气中通入2%氧气时,可得到性能最佳的锐钛矿相Nb掺杂TiO_2薄膜,所得薄膜可见光透过率高达80%,电阻率降至2.5×10^(-3)Ωcm。并且,Nb掺杂导致了TiO_2薄膜的吸收限产生蓝移,且蓝移程度随氧含量的改变而有所不同。研究认为,氧含量改变了Nb掺杂TiO_2薄膜晶体的结构形貌以及Nb杂质和氧空位提供的有效载流子浓度,从而直接影响了Nb掺杂TiO_2薄膜的光电性能。The Nb-doped TiO2 coatings were synthesized by triple-target magnetron co-sputtering. The impact of the O2 concentration mixed in argon environment and Nb-doping on the microstructures and properties of the Nbdoped TiO2 coatings was investigated with X-ray diffraction,atomic force microscopy and ultra violet visible spectroscopy. The results show that the Nb-doping and O2 concentration significantly affected the electronic structures and properties of the TiO2 coatings. For example,as the O2 concentration increased in 0% - 6% range,the surface roughness and size of anatase-phased grain increased,the visible-light transmittance changed in an increase-constant mode,accompanied by a decrease-increase change in resistivity. Deposited at O2-2%,the transmittance and resistivity were 80% and 2. 5 × 10^-3Ω·cm,respectively. Depending on the O2 concentration,Nb-doping resulted in a blue-shift of absorption edge,possibly because of the effective carrier concentration induced by a combination of Nbimpurity and O-vacancy.

关 键 词：磁控溅射 氧含量 NTO薄膜 结构 光电性能 

分 类 号：O484[理学—固体物理]