基于CPLD的半导体设备电源系统控制技术研究  

Study on the Controlling Technology of Semiconductor Equipment Power System Based on CPLD

作　　者：井海石[1] 肖雅静[1] 田洪涛[1] 熊朋[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2017年第2期47-51,共5页Equipment for Electronic Products Manufacturing

摘　　要：研究基于CPLD的半导体设备电源系统控制技术,介绍了CPLD相关知识、电源系统控制原理、电源系统控制硬件软件设计及抗干扰技术,最后结合实际应用指出基于CPLD的电源控制技术具有广泛的应用前景。In this paper, the controlling technology of semiconductor equipment power system based on CPLD is mainly studied on. The knowledge on CPLD, the power system controlling principles, the power system controlling designs of hardware and software, and the anti-interference technology are presented. At last, combined with the actual application, that the controlling technology of power based on CPLD has a wide prospect is pointed ont.

关 键 词：复杂可编程逻辑器件 半导体设备 电源系统控制 

分 类 号：TN86[电子电信—信息与通信工程]