硅微陀螺带通ΣΔ闭环检测环路设计  

Bandpass ΣΔ Closed-Loop Detection Circuit Design of Silicon Micro Gyroscope

作　　者：祝云峰[1] 吴志强[1] 朱欣华[1] 苏岩[1] 

机构地区：[1]南京理工大学MEMS惯性研究中心,南京210094

出　　处：《传感技术学报》2017年第1期88-93,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61301214)

摘　　要：本文研究了SDM调制器在陀螺闭环检测中的应用,主要针对其闭环检测的结构设计和参数获取作了相应的研究和阐述。硅微机械陀螺敏感模态为二阶模态,基于SDM调制器的设计原理,结合DSToolbox来设计整个闭环检测电路,得到闭环检测电路的结构和参数。最终仿真得到的闭环检测系统的信噪比达到了106 d B。在量程为±200°/s,带宽为200 Hz时,分辨率可以达到0.001°/s。The paper has studied the application of sigma-delta modulator in the detection circuit of silicon gyroscope,mainly on the choice of the structure and the obtaining of the parameters for the detection circuit. The sensitive modal of the gyro is a second order system,the research has designed a closed-loop detection circuit based on the principle of SDM modulator,and then get the structure and parameters combining DSToolbox. Finally got a closed-loop detection system for gyro which can reach a signal-to-noise ratio to 106 dB. When the range is ±200 °/s and bandwidth is 200 Hz,the resolution can reach 0.001 °/s.

关 键 词：硅微陀螺仪 闭环检测 SIGMA delta调制器 参数获取 信噪比 

分 类 号：TH824[机械工程—仪器科学与技术]