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作 者:羡小超[1] 李立新[1] 赵朔[1] 谭世语[1] 周志明[1]
出 处:《重庆大学学报(自然科学版)》2017年第4期70-77,共8页Journal of Chongqing University
基 金:教育部高等学校博士学科点专项科研基金(20120191120042);中央高校基本科研业务费科研专项(CQDXWL-2013-017)~~
摘 要:硅烷工作液的水解度数据可为建槽过程中浓缩液稀释倍数以及硅烷工作液循环利用研究提供重要依据。以双-(3-三甲氧基硅基丙基)胺(BAS)和乙烯基三乙酰氧基硅烷(VTAS)的混合体系为研究对象,异丙醇为内标物,采用气相色谱内标法对BAS/VTAS体系中两种硅烷的水解产物CH_3OH和CH_3COOH的浓度进行精确定量,并通过计算得到两种硅烷的水解度数据。该方法的有效性采用红外光谱法、极化曲线和CuSO4点蚀法进行验证。结果表明:气相色谱法能够有效、快速地表征BAS/VTAS混合体系中两种硅烷的水解度,其结果可作为硅烷水解液性能评判的定量依据。The data of hydrolysis degree is an important operation parameter for the cycling utilization of silanes and dilution of concentrated solution in the building of silane bath. In this paper, bis Etrimethoxysilylpropyl] amine (BAS) and vinyltriacetoxysilane (VTAS) were used as raw materials, isopropyl alcohol was adopted as internal standard, and gas chromatography was used to determine the hydrolysis degree BAS and VTAS by measuring the concentration of their hydrolysates, CH3 OH and CH:~ COOH, respectively. The effectiveness of the gas chromatography was confirmed further by infrared spectrum, polarization curves and CuSO4 drop test. The results indicate that gas chromatography can character effectively and rapidly the hydrolysis degree of silanes in BAS/VTAS system, and the results can offer quantitative basis for the evaluation of the property of silane.
分 类 号:TG174.4[金属学及工艺—金属表面处理]
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