合成CVD金刚石涂层用硬质合金基体预处理工艺优化研究  

Pretreatment Process Optimization of Carbide Matrix Used for CVD Diamond Coatings

作　　者：许晨阳[1] 解亚娟[1] 邓福铭[1] 陈立[1,2] 雷青[1] 

机构地区：[1]中国矿业大学(北京)超硬刀具材料研究所,北京100083 [2]信利光电股份有限公司,汕尾516600

出　　处：《人工晶体学报》2017年第4期682-687,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金(51172278);北京市自然科学基金(15L00025);北京教委科技成果转化项目(2010-583)

摘　　要：以CH_3COCH_3和H_2为反应气源,采用热丝CVD法在经过两步法和三步法预处理的YG6硬质合金(WC-6wt%Co)基体上沉积金刚石涂层。利用扫描电子显微镜和能谱仪分析检测预处理后的YG6基体的表面形貌和钴含量,通过对比三步法与两步法的预处理结果确定三步法最佳工艺。利用扫描电镜、X射线衍射仪和硬度计检测所得金刚石涂层的表面形貌、结晶性和膜基结合性。结果表明:三步法最佳工艺为先采用酸溶液腐蚀20 s,然后采用碱溶液腐蚀20 min,最后继续用酸溶液腐蚀3 min。三步法预处理后的YG6基体获得的金刚石薄膜生长更加均匀致密,晶粒取向更高,膜基结合性能更好。Diamond coatings were synthesized on the cemented carbide substrates of WC-6wt% Co pretreated by two-step and three-step pretreatments in CH3COCH3/H2 ambient adopt hot filament chemical vapor deposition. The WC-6wt% Co substrates pretreated were tested by scanning electron microscopy （SEM） and energy dispersive spectrometer （EDS） to analyze the surface morphologies and cobalt content of WC-6wt% Co substrates. The optimum of three-step pretreatment was obtained thorough the comparison of pretreatment results between two-step and three-step pretreatment, surface morphology, crystalline property, adhesion between films and WC-6wt% Co substrates of diamond coatings were analyzed by SEM,X-ray diffraction （XRD） and hardness tester. The results show that, the optimum of three-step pretreatment is corroding the substrate 20 s in the acid solution, and then corroding the substrate 20 rain in alkaline solution, and finally corroding the substrate 3 min in the acid solution. Diamond coating deposited on WC-6wt% Co substrate pretreated by three-step method is more uniform and compact and has better grain-orientation and adhesion property.

关 键 词：化学气相沉积 金刚石涂层 表面预处理 工艺优化 硬质合金基体 

分 类 号：TQ164[化学工程—高温制品工业] TG74[金属学及工艺—刀具与模具]