扩散硅压力传感器灵敏度温度归一化补偿算法  

Algorithm of Sensitivity Temperature Normalized Compensation for the Diffusion Silicon Pressure Sensors

作　　者：曹庆伟 

机构地区：[1]山东佰测传感科技股份有限公司,山东淄博255086

出　　处：《仪器仪表用户》2017年第5期1-4,共4页Instrumentation

摘　　要：文章主要介绍了公司在对于扩散硅压阻式压力传感器灵敏度温度补偿的工作中,经过长期探索、实验,发现了传感器补偿算法。在原先对压力传感器进行灵敏度温度误差补偿纠正的算法中,又加入了调节传感器满量程大小方法,并形成了成熟的归一化的数学模型。In this paper, it is mainly introduced in the works of the diffused silicon piezoresistive pressure sensors sensitivity temperature compensation in our company. After long-term exploration and experiment, we developed the compensation algorithm. In the original method to correct the temperature error of pressure sensors sensitivity, and we joined a new method to adjust sensors output of the full scale, and formed mature normalized mathematical model.

关 键 词：扩散硅压阻式压力传感器 灵敏度温度补偿 归一化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]