基于蓝光DVD光学读取头的非接触式探头  

Non-contact probe based on Blu-ray DVD pickup head

作　　者：程琳[1,2] 李丹东[2] 周斌[1,2] 陈晶[1] 李瑞君[2] 

机构地区：[1]安徽电气工程职业技术学院科技信息处,安徽合肥230051 [2]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《合肥工业大学学报（自然科学版）》2017年第5期606-609,共4页Journal of Hefei University of Technology：Natural Science

基　　金：安徽省高等学校自然科学研究重点资助项目(KJ2015A410);安徽电气工程职业技术学院重点科研资助项目(2015zdxm05)

摘　　要：为解决微小器件的高精度、高分辨率的测量问题,文章研制了一台基于蓝光DVD光学读取头的非接触式探头,实现了对微小尺寸的三维高精度测量。该探头的设计是对市售的蓝光DVD光学读取头的改进,改装后使用数值孔径为0.85的聚焦透镜。蓝光DVD光学读取头发出波长405nm的蓝光扫描被测量器件,减小了聚焦弥散斑直径,提高了探头的分辨率。对组装好的探头进行了测试,实验结果证实,该探头的分辨率优于1nm,对阶高为2μm的标准器件重复测量的标准差为21nm。To measure the miniature components in a high precision and high resolution way, a noncontact probe based on the Blu-ray DVD pickup head is developed. The commercial Blu-ray DVD pickup head is modified as the displacement sensor so as to meet the requirements of micro displacement measurement. The focusing lens of the pickup head is replaced with a obiective lens whose numerical aperture is 0. 85. The wavelength of the blue ray from the Blu-ray DVD pickup head is 405 nm. Comparing with the red ray, it is beneficial to reduce the dispersion spot diameter and improve the resolution of the probe. Finally, the developed probe is tested. Experimental results show that the resolution of the probe is better than 1 nm, and the standard deviation of the repeatable measurement for a 2 μm step-height specimen is 21 nm.

关 键 词：非接触探头 蓝光DVD读取头 聚焦 数值孔径 阶高 

分 类 号：TH741.3[机械工程—光学工程]