多周期溅射单质靶制备铜锌锡硫薄膜电池  

CZTS Thin Films Solar Cells Prepared By Multi-Period Sputtering Single Target

作　　者：陆熠磊 王书荣[1] 李志山[1] 蒋志[1] 杨敏[1] 

机构地区：[1]云南师范大学太阳能研究所云南省农村能源工程重点实验室,昆明650500

出　　处：《人工晶体学报》2017年第5期903-907,共5页Journal of Synthetic Crystals

基　　金：西南地区可再生能源研究与开发协同创新中心项目(05300205020516009);国家自然科学基金(61167003)

摘　　要：采用多周期磁控溅射单质靶Cu-Sn-Zn制备CZTS薄膜太阳电池。多周期包含两周期和四周期,同时与单周期制备的CZTS薄膜电池作对比。通过X射线衍射仪(XRD)、扫描电子显微镜(SEM)、能谱仪(EDS)和拉曼光谱仪(Raman)对不同周期得到的CZTS薄膜的晶体性质、表面样貌、化学成分等性质进行分析研究。分析结果显示,多周期制备的CZTS薄膜晶体质量要比单周期的好,表面均匀致密。重要的是四周期溅射制备的CZTS薄膜是研究的最佳实验组。最终把不同周期得到的CZTS薄膜制备成完整的器件结构,得到的太阳电池效率分别是:单周期2.64%,两周期3.01%,四周期3.36%。CZTS thin film solar cells were fabricated by magnetron sputtering multi-period Cu-Sn-Zn precursors. Multi-period includes double periods and four periods, meanwhile multi-period compared with CZTS thin films prepared by single period. The crystal structure, morphology, chemical composition and phase purity of CZTS thin film prepared by different periods were characterized by X Ray Diffraction （XRD）, scanning electron microscopy （SEM） equipped with an energy dispersive spectrometer（EDS） and Raman spectroscopy. The results reveal that the crystal quality of CZTS thin film prepared by multi- period is better than that of single period, especially having uniform and compact surface. The most important is that the CZTS thin films prepared by four periods sputtering are the better experiment group in this paper. Finally, complete device structures were fabricated using CZTS thin film with different sputtering periods, and 2.64% efficiency of CZTS by single period, 3.01% efficiency by double periods and 3.36% efficiency by four periods were obtained, respectively.

关 键 词：多周期 磁控溅射 铜锌锡硫(CZTS) 薄膜太阳电池 

分 类 号：TM913[电气工程—电力电子与电力传动]