柔性铰链支撑式动镜的误差分析  

Error Analysis of Moving Mirror Based on Flexible Hinge Support

作　　者：冯骏豪 曾立波[1] 吴琼水[1] 许贤泽[1] 

机构地区：[1]武汉大学电子信息学院,湖北武汉430079

出　　处：《仪表技术与传感器》2017年第5期35-39,共5页Instrument Technique and Sensor

基　　金：国家科技支撑计划课题(2011BAF02B02)

摘　　要：柔性铰链支撑式动镜系统广泛应用于便携式、工程在线测量的傅里叶变换红外光谱仪中。而在运动过程中,柔性铰链与动镜的微弱形变会给动镜引入不同程度的误差。通过建立数学模型,并结合调制度与初相位来分析系统存在的误差。结果表明:动镜的动态垂直度误差会严重影响信号干涉的质量,动镜行程、速度是其影响因素。可通过设计上的优化来减小其影响,对动镜的制作有借鉴意义。Moving mirror scanning system based on the flexible hinge support was widely used in the portable and on-line Fourier transform infrared spectrometer.The subtle deformation of flexible hinge and moving mirror resulted in error in varying degrees ,when it was moving.To analyze the error of the system, a math model was built combined with modulation depth and the initial phase.Result shows that dynamic perpendicularity error can seriously affect the quality of signal interference.And the round trip and speed of moving mirror are the influence faetors.By optimizing design can reduce its affection.It also has reference significance to the production of moving mirror.

关 键 词：傅里叶变换红外光谱仪 动镜 立体角镜 柔性铰链 动态垂直度误差 

分 类 号：TH744[机械工程—光学工程]