8MW单极性脉冲磁控溅射电源的设计  

Design of 8 MW Unipolar Pulse Magnetron Sputtering Power Supply

作　　者：张秀梅[1] 李红泽[1] 刘洋[1] 窦久存 

机构地区：[1]长春工业大学,电气与电子工程学院,吉林长春130012 [2]唐山标先电子有限公司,河北唐山064200

出　　处：《电力电子技术》2017年第6期75-76,103,共3页Power Electronics

基　　金：河北省中小企业创新基金项目(16C1303151002)~~

摘　　要：设计了一种8 MW单极性脉冲磁控溅射电源,详细介绍了脉冲发生电路的拓扑结构及IGBT相关的关键技术。通过对所设计的8 MW单极性脉冲磁控溅射电源在Matlab中搭建Simulink模型进行数值仿真分析,然后在理论分析的基础上简化电路结构并搭建实验样机,在模拟负载条件下进行实验分析,得到了IGBT开关组均流、均压波形以及8 MW峰值功率输出波形,通过比较,实验结果与仿真数值分析波形基本一致。A 8 MW unipolar pulse magnetron sputtering power supply is designed, detailing the pulse, generating cir- cuit topology and related key technologies of IGBT pulse generating circuit.By 8 MW unipolar pulse magnetron sput- tering power,a Simulink model is built in Matlab numerical simulation analysis.Based on the theoretical analysis of the simplified circuit structure ,a prototype is built and experimental analysis under simulated loading conditions to give the IGBT switch group average current, average voltage, and 8 MW peak power output waveforms.The simulation analysis and experimental waveforms are basically the same through the comparison.

关 键 词：电源 脉冲 磁控溅射 

分 类 号：TN86[电子电信—信息与通信工程]