MEMS环形振动陀螺结构设计与仿真分析  

Structure Design and Simulation Analysis of a MEMS Ring Vibration Gyroscope

作　　者：寇志伟[1,2] 曹慧亮[1,2] 刘俊[1,2] 冯恒振 任建军[1,2] 连树仁 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2017年第7期479-484,491,共7页Micronanoelectronic Technology

基　　金：山西省回国留学人员科研资助项目(2016083)

摘　　要：针对轴对称壳形振动陀螺的工作机理与振动特性,提出了一种新颖的全对称U型梁MEMS环形波动陀螺,并分析了其工作原理、振动特性与敏感工作方式。在此基础上应用ANSYS有限元分析软件建立了该环形振动陀螺谐振结构的有限元模型,分别进行了模态分析、谐响应分析、瞬态冲击响应分析与静力分析。仿真分析结果显示该环形陀螺驱动与敏感模态固有频率的频差为33 Hz,工作模态的频率匹配性较好;工作模态与其他振动模态的最小频差为1 032 Hz,能够有效抵抗环境振动的干扰;谐振结构在10 000g的瞬态冲击作用下最大应力为39.5 MPa,可以正常稳定工作。According to the operating mechanism and vibration characteristics of the axially symmetric thin shell vibrating gyroscope,a novel MEMS ring vibration gyroscope with holosymmetric U springs was proposed,and its operating principle,vibration characteristics and sensitive operating mode were analyzed.On the basis of this,the finite element model of the ring vibration gyroscope resonant structure was established by using ANSYS finite element analysis software.Furthermore,the modal analysis,harmonic response analysis,transient impact response analysis and static analysis were performed.The results of the simulations and analyses show that the natural frequency difference between the driving mode and sensing mode of the ring gyroscope is33 Hz,and the frequency matching of operating modes is better.The minimum frequency difference between the operating mode and other vibration modes is 1 032 Hz,which can effectively resist the interference of environmental vibration.The maximum stress of the resonant structure is 39.5 MPa under the transient impact of 10 000 g,in which case the MEMS ring vibration gyroscope can work stably.

关 键 词：微电子机械系统(MEMS) 环形振动陀螺 振动特性 有限元分析 工作模态 模态分析 

分 类 号：V241.554[航空宇航科学与技术—飞行器设计]