使用椭偏光谱研究氮化铝薄膜在不同温度下的光学性质（英文）  

Temperature-dependent optical properties of AlN films characterized by spectroscopic ellipsometry

作　　者：林书玉[1] 吴峰[2] 陈长清[2] 梁毅[1] 万玲玉[1] 冯哲川 

机构地区：[1]广西大学物理科学与工程技术学院,广西相对论天体物理重点实验室,光电子材料与探测技术实验室,广西南宁530004 [2]华中科技大学武汉光电国家实验室,湖北武汉430074

出　　处：《红外与毫米波学报》2017年第3期276-279,301,共5页Journal of Infrared and Millimeter Waves

基　　金：National Natural Science Foundation of China(61367004,11604058);Guangxi Key Laboratory for Relativistic Astrophysics-Guangxi Natural Science Creative Team funding(2013GXNSFFA019001);Guangxi Natural Science Foundation(2016GXNSFBA380244)

摘　　要：通过椭偏仪对生长在蓝宝石上的不同厚度氮化铝薄膜的变温光学性质进行了研究,并采用托克-洛伦兹模型对椭偏实验数据进行了拟合分析,精确得到了氮化铝薄膜的厚度和光学常数(折射率n,消光系数k)等.研究的结果表明:相比薄的氮化铝薄膜,厚的氮化铝薄膜的折射率较大.随着温度的升高,氮化铝的折射率、消光系数和带隙会向低能端单调地移动(红移);厚度对带隙随温度改变的影响较小,对折射率则有一定的影响.We investigated the optical properties of A1N films with different thicknesses grown on sapphire by spec- troscopic ellipsometry at different temperature. Based on a Tauc-Lorentz dispersion model, thickness and optical constants （ the refractive index n, the extinction coefficient k） of A1N films were extracted by fitting the experimen- tal data. Our results show that the refractive index of thicker A1N film possesses bigger values. Similar to the previ- ous report, it was also found that the refractive index, the extinction coefficient and band gap of A1N films shift monotonously to lower energies （ a redshift） with temperature increasing. Moreover, with rising temperature, var- ying the thicknesses of the films exhibits little influence on the shrinkage of bandgap but slight influence on the changes of the refractive index.

关 键 词：氮化铝 椭偏仪 厚度 温度 

分 类 号：O433.1[机械工程—光学工程]