非晶Fe-Zr-B薄膜穆斯堡尔谱学研究  

Msbauer spectroscopic study on the amorphous Fe-Zr-B films

作　　者：程新利[1] 许裕生[2] 徐炜新[2] 金慧娟 

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050 [2]苏州大学物理科技学院,苏州215006

出　　处：《核技术》2003年第2期146-150,共3页Nuclear Techniques

摘　　要：用X射线衍射分析、X射线光电子能谱(XPS)和穆斯堡尔谱学研究了直流磁控溅射法制备的Fe-Zr-B薄膜。X射线衍射分析结果表明制备态的薄膜是非晶的;X射线光电子能谱(XPS)结果表明样品表面氧化较明显,深层部分Fe, Zr, B结合占主导地位;穆斯堡尔谱学结果表明薄膜中Fe原子周围Zr、B原子的存在使Fe原子核内场值有所下降并导致超精细场分布P(H)出现双峰结构,薄膜中存在两种不同的局域微结构。The amorphous Fe-Zr-B films prepared by DC magnetron sputtering have been studied using X-ray dif-fraction, XPS and Msbauer spectroscopy, and compared with amorphous ultrafine Fe-Zr-B powder prepared by chemical reduction. The XPS shows that surface of the film is oxidized partly, the interactions among Fe, Zr, B are strong in deeper part. The result of Msbauer spectroscopy shows that Zr and B atoms around Fe atoms cause the re-duction of hyperfine field at Fe nucleus and make the distribution of magnetic hyperfine field with two peaks. This implies that the amorphous Fe-Zr-B film consists of two amorphous microstructures.

关 键 词：Fe-Zr-B合金 非晶薄膜 直流磁控溅射 穆斯堡尔谱学 

分 类 号：O484[理学—固体物理]