激光织构化TiN薄膜的干摩擦性能研究  

Tribological Behavior of Laser Textured TiN Films under Dry Friction Condition

作　　者：剡珍 孙嘉奕[1] 姜栋[1] 王德生[1] 权鑫[1] 翁立军[1] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [2]中国科学院中国科学院大学,北京100049

出　　处：《摩擦学学报》2017年第4期518-526,共9页Tribology

基　　金：国家自然科学基金项目(51505463)资助~~

摘　　要：采用固体Nd:YAG激光器对离子镀TiN薄膜进行织构化处理,表征了薄膜的结构、形貌及凹坑织构参数.通过UMT-2往复式球-盘摩擦磨损试验机评价了织构化薄膜的摩擦磨损特性,研究了织构形貌对TiN薄膜干摩擦条件下摩擦磨损性能的影响.研究结果表明:与未织构化的TiN薄膜相比,织构化TiN薄膜的平均摩擦系数降低,并且磨损率明显减小,这说明织构化TiN薄膜具有更好的耐磨损性能.摩擦过程中,凹坑织构既捕获了磨屑,又有利于摩擦过程中阶跃运动的发生,易于将磨屑带出磨痕,从而降低了摩擦磨损.The surface texture of as-obtained TiN films prepared by multi-arc ion plating technique on steel substrate was produced with Q-switched solid-state Nd：YAG laser. Surface morphologies and dimple parameter of the textured TiN films were characterized using the scanning electron microcopy and a surface profilometer. The effect of textured morphologies on friction and wear performance of TiN films under dry friction condition was investigated by a UMT-2 reciprocating ball-on-disk tribometer. The results showed that the average friction coefficient and wear rate of textured films were lower than those of the untextured film, which revealed better friction-reducing and anti-wear properties for textured films. Based on the analyses of the surface morphologies and chemical element composition in the wear tracks,the wear mechanism was discussed. The better tribological performance of textured TiN films was attributed to the dimples trapping the wear debris and ramp motion migrating wear debris out of the friction track during the sliding process.

关 键 词：织构化 TIN薄膜 干摩擦 磨损机理 

分 类 号：TH117.3[机械工程—机械设计及理论]