柔性衬底氧化物半导体透明导电膜的研究进展  

Process in transparent conducting oxide films prepared on flexible substrates

作　　者：郝晓涛[1] 张德恒[1] 马瑾[1] 杨莺歌[1] 王卿璞[1] 程传福[2] 田茂华 马洪磊[1] 

机构地区：[1]山东大学物理与微电子学院,山东济南250100 [2]山东师范大学物理系,山东济南250014

出　　处：《功能材料》2002年第4期354-356,359,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目 (698760 2 5 ;60 0 760 0 6) ;山东省科委 ;山东省自然科学基金资助项目

摘　　要：回顾和评述了柔性衬底氧化物透明导电膜 (包括锡掺杂的三氧化二铟ITO薄膜、铝掺杂的氧化锌AZO薄膜等 )的研究进展情况。报道了在柔性衬底上制备的ITO膜、ZnO膜的光电性质对衬底种类、制备工艺以及制备参数的依赖关系 。The progress in the study on TCO films (including ITO films and AZO films) prepared on organic substrates was reviewed in this paper. It was also reported that the optical and electronic properties of films deposited on flexible substrates depend on substrate types, preparation techniques and parameters. In addition, the future work that should be done in this field was mentioned.

关 键 词：柔性衬底 氧化物半导体 透明导电膜 研究进展 

分 类 号：TN304.21[电子电信—物理电子学]