Cu/Al_2O_3复合薄膜的制备及其抗氧化性能  

Preparation and Oxidation Resistance of Cu/Al_2O_3 Thin Film

作　　者：盛澄成 徐阳[1] 魏取福[1] 乔辉[1] 

机构地区：[1]江南大学生态纺织教育部重点实验室,江苏无锡214122

出　　处：《材料科学与工程学报》2017年第4期596-599,606,共5页Journal of Materials Science and Engineering

基　　金：江苏省自然科学基金资助项目(BK20150155);江苏省产学研联合创新资金资助项目(BY2014023-23)

摘　　要：本文在纺织纤维基材表面采用二次溅射沉积法制备了Cu/Al_2O_3复合薄膜,利用扫描电镜(SEM)、X射线能谱仪(EDX)和矢量网络分析仪对室温环境下存放3600h的复合薄膜的表面形貌、元素含量以及屏蔽效能进行了测试,并与相同工艺条件下制备的纯Cu薄膜进行了对比分析。结果表明:与纯Cu薄膜结构的不稳定性相比,由于复合薄膜表层Al_2O_3薄膜的结构稳定性和致密性,Cu/Al_2O_3复合薄膜在保证高屏蔽性能的前提下,具有整体结构的稳定性,表现出了良好的抗氧化性能。Cu/Al2O3 thin film deposited on the surface of fiber substrate by the secondary sputtering deposition method. Surface morphology,element content and shielding effectiveness of Cu/Al2O3 thin film that deposited with 3600 hours under the room temperature were tested by scanning electron microscope （SEM）, energy dispersion X ray spectrometer（EDX） and vector network analyzer. Cu/Al2O3 thin film was compared with copper film on the same processing conditions. Results show that the structure of copper is unstable. However, the structure of Al2O3 film which is on the surface of composite film is stable and compact. Cu/Al2O3 thin film ensure higher shielding property, and its whole structure is still stable. It also has great oxidation resistance.

关 键 词：磁控溅射 Cu/Al2O3复合薄膜 屏蔽效能 抗氧化性能 

分 类 号：TS176.5[轻工技术与工程—纺织材料与纺织品设计]