基于多轮廓型腔结构件表面DLC薄膜的制备与性能研究  

Based on Multi Contour Cavity Structure Surface Preparation and Properties of DLC Thin Films

作　　者：王德山[1] 胡兵兵[1] 徐汇音[1] 李奇亮[1] 李卫国[1] 

机构地区：[1]苏州大学机电工程学院,江苏苏州215131

出　　处：《装备制造技术》2017年第7期69-71,共3页Equipment Manufacturing Technology

基　　金：江苏省基础研究计划(自然科学基金)面上研究项目(编号:BK20151220;项目名称:"多轮廓型腔结构件磁控溅射类金刚石碳膜附着机理研究")

摘　　要：类金刚石碳膜是力学综合性能、耐磨损、耐腐蚀和透光性能好的薄膜,在先进制造技术领域得到了越来越多的应用。通过类金刚石(DLC)薄膜制备方法与机械特性的阐述,对不同磁控溅射法对多轮廓型腔结构件表面DLC薄膜结构性能的干扰制约,以及DLC薄膜工艺技术制定方案的关键问题进行深入探究。Diamond like carbon film is a kind of thin film with comprehensive mechanical properties,wear resistance,corrosion resistance and light transmission performance. It has been used more and more in advanced manufacturing technology. The diamond-like carbon（DLC） method and the mechanical properties of thin films were prepared on different interference constraints on magnetron sputtering on the microstructure and properties of DLC film surface multi contour cavity structure,key problems and technology of DLC film making program of in-depth research.

关 键 词：类金刚石碳膜DLC 磁控溅射 多轮廓型腔 工艺性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]