正弦波激励过程中无阀压电微泵流量的研究  

Flow Rate of Valveless Piezoelectric Micropump in Sinusoidal Excitation

作　　者：张卓[1] 田勇[1] 关炎芳[1] 李祥[1] 

机构地区：[1]河南工业大学机电工程学院,河南郑州450007

出　　处：《科技创新与生产力》2017年第8期88-90,共3页Sci-tech Innovation and Productivity

基　　金：国家自然科学基金项目(51505128)

摘　　要：介绍了无阀压电微泵的概念和微泵的研究背景,指出无阀压电微泵是通过在压电陶瓷驱动器上通入规律性变化的电流来使其产生规律性振动从而产生连续流动的微泵,针对无阀压电微泵的特性,设计了一种PDMS-玻璃-PDMS的无阀压电微泵结构。通过实验数据分析结果可知:在同一电压下,无阀压电微泵的流量随频率的增加而呈抛物型形状,在频率为300 Hz的情形下达到最大流量;无论电压如何变化,无阀压电微泵的流量随频率的变化规律明显;在其他条件相同的情况下,无阀压电微泵的流量和电压之间存在一定的关系。This paper introduces the concept of valveless piezoelectric micropump and the research background of micropump,points out that valveless piezoelectric micropump produces the continuous flow by passing the regular current on piezoelectric ceramic actuator to generate regular vibration. Based on the characteristics of valveless piezoelectric micropump, the micropump structure of PDMS-glass-PDMS is designed. The result of experimental data analysis shows that under the same voltage,the micropump flow rate presents a parabolic shape with the increase of frequency and it is maximum when the frequency is300 Hz. No matter how the voltage changes, the change of flow rate with frequency is obvious, and if other conditions are same, there is a certain relationship between the flow rate and the voltage of valveless piezoelectric micropump.

关 键 词：微泵 微电子机械系统 MEMS 聚二甲基硅氧烷 PDMS 流量测试 频率 

分 类 号：TP21[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]