基于RFID的数字化掩模制造  

Digital Mask Manufacturing Based on RFID

作　　者：张鹏 丁晗 沈天翊 胡超 

机构地区：[1]无锡中微掩模电子有限公司,江苏无锡214135

出　　处：《电子与封装》2017年第8期44-48,共5页Electronics & Packaging

摘　　要：介绍了中微掩模智能化生产系统,提出了利用RFID技术实现对掩模版制造流程的智能化管理。利用智能化生产系统提高了和客户之间的交互性,利用智能货柜系统实现了掩模版私有云制造。依托现有智能生产管理系统,提出了集成电路全产业链智能制造的概念。In the paper, an intelligent production system for Wuxi Zhongwei Mask Electronics Company and RFID-based intelligent management of mask manufacturing process are presented. The use of intelligent production systems enhances the interaction with customers. The private cloud manufacturing of mask is realized by the intelligent container system. Based on the existing intelligent production management system,the concept of integrated circuit whole industry chain intelligent manufacturing is proposed.

关 键 词：掩模数字化生产 全生命周期管理 

分 类 号：TN305.7[电子电信—物理电子学]