半导体超晶格属性的高分辨率X射线衍射研究  

SUPERLATTICE USING DYNAMICAL THEORY AND KINEMATICAL THEORY OF X-RAY DIFFRACTION

作　　者：张党卫[1] 张景文[2] 侯洵[1,3] 

机构地区：[1]西北大学光子学与光子技术研究所 [2]中国科学院西安光学精密机械研究所 [3]中国科学院西安光学精密机械研究所,西安710068

出　　处：《光子学报》2002年第8期1007-1011,共5页Acta Photonica Sinica

摘　　要：详细阐述了低维半导体材料的X射线衍射的动力学理论和运动学理论 从高木 陶平 (T T)方程出发 ,基于波动光学原理 ,推导出任意结构的多层膜的X射线衍射振幅的递推关系式 并编写X射线衍射的程序 ,分别用动力学和运动学衍射理论模型模拟了 2 0层GaAlAs/GaAs超晶格的X射线衍射结果 。X ray diffraction dynamical theory and kinematical theory for low dimension semi conductor hetero epitaxy materials are explicated particularly.Originated from Takagi Taupin equation and based waved optics theory,the recursion formulate of reflection amplitude for arbitrary structure multi layer are obtained.Originating from X ray dynamic theory and ignoring the effects of multi reflection,the general formulate of X ray kinematical theory are obtained.A computer program was written using above theory to calculating X ray diffraction from 20 layers GaAlAs/GaAs superlattice.The experiment data is simulated using dynamical and kinamical theory respectively to get the structure parameters of the sample,such as thickness,strain and composition.

关 键 词：X射线衍射 低维半导体 超晶格 动力学理论 运动学理论 计算机模拟 

分 类 号：O471.4[理学—半导体物理] O722[理学—物理]