太阳光谱金属-介质干涉型强吸收膜的研究  

Strong Absorption Film of Metal-Dielectric Interference of Solar Spectrum

作　　者：付秀华[1] 郭凯[1] 张静[1] 熊仕富[1] 姜洪妍 孙兵[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《中国激光》2017年第8期153-159,共7页Chinese Journal of Lasers

基　　金：吉林省重大科技攻关专项(20140203002GX)

摘　　要：随着军事隐形、太阳能转换以及激光热处理等技术研究的日益深入,对表面吸收膜的技术要求不断提高。为满足太阳光谱吸收的要求,研制了一种在400~2500nm波段具有强吸收作用、适应多种基底的光学薄膜。通过分析吸收理论,建立吸收结构模型,并结合材料的特性研究,实现了吸收膜的设计。采用真空离子辅助沉积技术,根据逆向反演法,对"分步沉积"工艺二次优化,制备了太阳光谱强吸收膜。测试结果表明,研制的吸收膜在400~2500nm波段的平均吸收率为98.15%。制备的吸收膜通过了机械牢固度测试,与基底能够很好地结合。With the deepening of research on the military stealth, solar energy conversion, laser heat treatment and other technologies, the technical requirements for surface absorption films are continuously improved. In order to meet the requirements of solar spectrum absorption, a novel optical film with strong absorption in the 400-2500 nm band is developed, which is applicable to multiple kinds of substrate. The absorption structure model is established based on the absorption theory, and the design of the absorption film is realized by combination of the characteristics of the materials. The solar spectrum strong absorption film is prepared based on the vacuum ion-assisted deposition technique and the fractional deposition process optimized by the reverse inversion method. The test results show that the average absorptance of the absorption film is 98.15~ in the range of 400-2500 nm. The prepared absorption films can meet the requirement of mechanical fastness and have better adhesiveness to the substrate.

关 键 词：光谱学 吸收膜 太阳光谱 材料特性 离子辅助沉积 分步沉积 

分 类 号：O484[理学—固体物理]