基于FR-4的电磁驱动微扫描镜研究  

Research of Electromagnetic Actuated Micro Scanning Mirror Based on FR-4

作　　者：郭向楠[1] 苑伟政[2,3] 王军平[1] 虞益挺[2,3] 孟庆超[1] 乔大勇[2,3] 

机构地区：[1]中国空空导弹研究院,河南洛阳471009 [2]西北工业大学空天微纳系统教育部重点实验室,西安710072 [3]西北工业大学陕西省微/纳米系统重点实验室,西安710072

出　　处：《航空兵器》2017年第4期75-79,共5页Aero Weaponry

基　　金：中航产学研创新基金(CXY2012XG12)

摘　　要：设计一种基于FR-4材料的电磁驱动微扫描镜,进行了有限元仿真,并利用标准PCB技术制作了器件。测试结果表明,器件具有约0.015(°)/m A的静态转角,在50~500 Hz驱动频率下光学转角始终大于±2°,在360 Hz处达到最大±34.18°,同时反馈电压与扫描角度具有良好的线性关系。器件通过了高低温及寿命试验,其可靠性得到了验证。An electromagnetic actuated micro scanning mirror based on FR-4 is designed and the fi-nite element simulations are implemented to determine the device performance, then it is fabricated using standard printed circuit board technology. Test result shows that the device turns 0.015 （°）/mA at static mode and gives total optical scan angles more than ±2° at frequency ranging from 50 to 500 Hz, and the maximum angle is ± 34. 18° at frequency of 360 Hz. The feedback voltage has a good linear relationship with scan angle. High and low temperature test and lifetime test verify the reliability of the electromagnetic actuated micro scanning mirror.

关 键 词：FR-4 微扫描镜 电磁驱动 有限元仿真 性能测试 

分 类 号：TH74[机械工程—光学工程]