基于MEMS技术的F-P腔滤波器分析与设计  

Analysis and design of MEMS-based F-P cavity filter

作　　者：李元元[1,2] 蒙庆华[1] 陈四海[1] 曾毅波[3] 郭航[3] 

机构地区：[1]中国科学院深圳先进技术研究院,广东深圳518055 [2]西安电子科技大学微电子学院,陕西西安710071 [3]厦门大学萨本栋微米纳米科学技术研究院,福建厦门361005

出　　处：《传感器与微系统》2017年第8期69-71,74,共4页Transducer and Microsystem Technologies

基　　金：深圳市科技计划资助项目(JCYJ20140610151856737)

摘　　要：通过对微光纤法布里-珀罗(F-P)腔滤波器工作原理的综合分析,确立了微F-P腔滤波器静电驱动腔长调谐方案。对可调谐滤波器的主体部分进行光学设计和分析,确立了反射镜的多层薄膜光学结构,并借助ANSYS有限元力电耦合分析,最终选择L型桥臂支撑的腔体结构,可以实现0.625μm的调谐范围;保持桥面平行的能力很高,可实现高精度的滤波效果;结构稳固,能够抵抗制造时的残余应力。By comprehensive analysis on working principle of micro F-P cavity filter,the optimum tuning scheme of micro F-P cavity filter is established. The main part of the optical structure is designed,a multilayer film structures of the mirror is established,and with the help of ANSYS finite element electro-mechanical coupling analysis,L type bridge arm supported cavity structure is finally established,the structure can achieve a considerable range of tuning 0.625 μm; relatively high fill factor,filter light leakage is avoided; the high ability to keep parallel can achieve high precision filtering effect; structural stability can resist the residual stress of manufacture.

关 键 词：滤波器 调谐 反射镜 腔体结构 

分 类 号：TN713[电子电信—电路与系统]