硬X射线亚微米聚焦高稳定柔性铰链压弯机构的模拟分析  

Simulation and analysis of a high-stability flexure bending mechanism for hard X-ray submicron focusing

作　　者：潘要霖 毛成文[1] 舒德明 李爱国[1] PAN Yaolin MAO Chengwen SHU Deming LI Aiguo(Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Jiading Campus, Shanghai 201800, China University of Chinese Academy of Sciences, Beijing 100049, China Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA)

机构地区：[1]中国科学院上海应用物理研究所嘉定园区,上海201800 [2]中国科学院大学,北京100049 [3]Advanced Photon Source,Argonne National Laboratory

出　　处：《核技术》2017年第9期11-18,共8页Nuclear Techniques

基　　金：国家自然科学基金(No.U1332120)资助~~

摘　　要：空间分辨率和聚焦效率是X射线微纳探针最关键的技术指标。压弯非球面镜具备聚焦效率高、空间分辨好、加工难度低、色散消除等优点。基于上海光源硬X射线微聚焦及应用线站的现有条件,在精确压弯理论的基础上设计了高精度柔性铰链压弯机构并进行了有限元分析,并且进一步对压弯镜体宽度进行了优化。通过长程面形仪(Long Trace Profiler,LTP)对压弯机构的测试,得到压弯非球面镜的斜率误差为430 nrad,理论上可实现230 nm的硬X射线聚焦光斑。Background： The spatial resolution and focusing efficiency are the key parameters for X-ray micro-and nano-probe. Aspherical bent mirror is of great advantages such as high spatial resolution, high focusing efficiency, easy machining and achromatic. Purpose： This study aims to design a sub-micron focused bending mechanism.Methods： A high-precision flexure bending mechanism is designed for hard X-ray micro-focusing beamline（BL15U1） at Shanghai synchrotron radiation facility（SSRF） on the basis of exact bending theory. The simulation of finite element analysis（FEA） and width optimization are completed. Finally proposed bending mechanism was tested by long trace profiler（LTP）. Results： The testing results show that the achieved slope error is 430 nrad. Conclusion： This high-stability flexure bending mechanism can produce a theoretical spatial resolution at 230 nm.

关 键 词：X射线微纳探针 压弯非球面镜 柔性铰链 有限元分析 

分 类 号：TL99[核科学技术—核技术及应用]