TiZrN薄膜不同Zr含量时的微观结构及摩擦学性能  

Effects of Zr Content on Microstructure and Tribological Behavior of TiZrN Films

作　　者：宋驰 王灿明[1] 孙宏飞[1] 刘亮 刘振振 

机构地区：[1]山东科技大学材料科学与工程学院,山东青岛266590

出　　处：《材料保护》2017年第8期1-4,共4页Materials Protection

基　　金：山东省科技发展资助计划项目"多主元高熵合金及涂层技术研究"(2013GGB01096)

摘　　要：为了进一步评价Zr含量对TiZrN薄膜摩擦学性能的影响,采用反应磁控溅射法制备了Ti_(1-x)Zr_xN薄膜(0.14<x<0.56)。通过XRD,SEM技术分析了TiZrN薄膜的微观结构,考察了不同Zr含量时TiZrN薄膜的摩擦磨损性能。结果表明:TiZrN薄膜的晶体结构不因Zr的加入而改变,仍为面心立方结构;TiZrN薄膜为合金化复合膜,Zr以置换方式固溶于TiN中,随着Zr含量的升高,晶粒明显细化,柱状晶生长模式发生转变;TiZrN薄膜结构致密且硬度更高,小晶粒在摩擦磨损中能有效阻止裂纹的扩展,其抗摩擦磨损性能较TiN薄膜有明显的提高。For further studying the effects of Zr content on the tribological behavior of TiZrN films,the titanium and zirconium nitride films （Ti1-xZrxN） with different Zr concentrations （0.14〈x〈0.56） were synthesized by DC magnetron sputtering.XRD and SEM were utilized to analyze the microstructure of TiZrN films,and the tribological properties of TiZrN films with different Zr contents were evaluated.Results showed that the crystal structure of TiZrN films changed little with adding Zr element,and still remained as face-centered cubic structure.TiZrN films belonged to alloy films with Zr atoms dissolved in TiN as substitutional atoms.As Zr content increased,the crystal grain became evidently refined,and the growing model of cylindrical crystal changed.Moreover,TiZrN films possessed denser structure and higher hardness.The small crystal grain could effectively prevent the extension of cracks,and the tribological properties of TiZrN films were improved better than those of TiN films.

关 键 词：TiZrN薄膜 摩擦磨损 微观结构 反应磁控溅射 

分 类 号：TB383.2[一般工业技术—材料科学与工程]