Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios  

作　　者：Ying Xu Lin-Yan Hou Xiao-Meng Zhang 

机构地区：[1]Zhang Hebei Province Key Laboratory of Inorganic Nonmetallic Materials,Materials Science and Engineering College,North China University of Science and Technology,Tangshan 063009,China

出　　处：《Rare Metals》2017年第9期753-757,共5页稀有金属（英文版）

基　　金：financially supported by the National Natural Science Foundation of China(No.51342006)

摘　　要：Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition（MOCVD）. The crystallization, microstructure and optical properties were investigated by scanning electronic microscope（SEM）,X-ray diffraction（XRD） and ultraviolet-visible（UV-Vis）spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11：18,the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm.Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80% in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7：18.Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition（MOCVD）. The crystallization, microstructure and optical properties were investigated by scanning electronic microscope（SEM）,X-ray diffraction（XRD） and ultraviolet-visible（UV-Vis）spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11：18,the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm.Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80% in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7：18.

关 键 词：Sn/Zn ratio MOCVD ZTO thin films Envelope method Optical properties 

分 类 号：TN304.055[电子电信—物理电子学]