高纯六氟乙烷的制备及应用研究进展  

Research Progress in Properties, Purification, Preparation and Application of Hexafluoroethane

作　　者：丁元胜[1] 蔡伟豪 褚晨啸 白占旗[1] 张金柯[1] 缪光武 张建君[1] 张波[2] DING Yuan-sheng CAI Wei-hao ZHU Chen-xiao BAI Zhan-qi ZHANG Jin-ke MIAO Guang-wul ZHANG Jian-junz ZHANG Bo(Zhejiang Chemical Industry Research Institute Co., Ltd., Hangzhou, Zhejiang 310023,China College of Engineering ,Zhejiang University of Technology ,Hangzhou , Zhejiang 310032 ,China College of Chemical Engineering,Zhejiang University of Technology, Hangzhou, Zhejiang 310032, China)

机构地区：[1]浙江省化工研究院有限公司,浙江杭州310023 [2]浙江工业大学化工学院,浙江杭州310032 [3]浙江工业大学教科学院,浙江杭州310032

出　　处：《浙江化工》2017年第9期1-5,共5页Zhejiang Chemical Industry

摘　　要：高纯度的六氟乙烷主要用于蚀刻气体、器件清洗剂、制冷剂等行业。本文介绍了六氟乙烷的性质、制备以及高纯度六氟乙烷的纯化方法,并提出纯度对应用前景的重要性。Highly pure hexafluoroethane is used for etching gases, cleaning agents and so on.It introduced the properties, preparation and purification methods of hexafluoroethane and proposed the importance of purity to application prospect.

关 键 词：六氟乙烷 性质 电子气体 高纯 应用 

分 类 号：TQ222.23[化学工程—有机化工]