新型共平面微气体传感器微热板的优化设计  

Design and Optimization of New Coplanar Micro Gas Sensor

作　　者：官修龙 刘丽[1] 何越[1] 王连元[1] 

机构地区：[1]超硬材料国家重点实验室,吉林大学物理学院,吉林长春130012

出　　处：《仪表技术与传感器》2017年第9期17-19,23,共4页Instrument Technique and Sensor

基　　金：吉林省科技厅重点科技攻关项目(20140204027GX)

摘　　要：利用金属铂良好的热敏、热阻特性,以及Si O2良好的绝热、绝缘性能,设计了以铂为加热电极、以Si O2为绝缘材料的新型共平面微结构气体传感器。为了使该传感器获得高且均匀的温度分布,利用有限元软件ANSYS对该传感器的电极和基底进行仿真分析,并进一步优化该传感器的基底以及电极参数。仿真结果表明:传感器基底形状设计为方形结构,基底的前Si O2层、中间Si层、后Si O2层的厚度依次为1、199、100μm,且加热电极的宽度及间距均为20μm、信号电极宽度为40μm时,传感器上获得了最佳的温度分布,此时的磁场分布也较好,有利于传感器整体性能的提高。Due to the thermal resistant and sensitive characteristics of meter platinum,as well as the heat and electricity insulating characteristics of Si O2,a novel planar structure of micro gas sensor was designed with platinum as heating electrode and Si O2 as insulation material.In the interest of obtain uniform temperature distribution,the substrate and eletrode structures of the micro gas sensor were analyzed and optimized by using finite element analysis tool,in which the substrate chickness and electrode distribution of micro gas sensor were further optimized.The simulation results exhibit that when the substrate of the sensor is designed as square structure,the thickness of front Si O2,Si and rear Si O2 in the substrate of the sensor are 1,199,100 μm respectively,the heating electrode width and spacing is 20 μm and the signal electrode width is 40 μm,high and uniform temperature distribution can be obtained on the sensor which is helpful to improve the whole performance of the sensor.

关 键 词：微气体传感器 ANSYS 微加热器 温度分布 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]