真空仪器设备应用与发展  

The Current Development of Vacuum Technology in Vacuum Equipments and Vacuum Instruments

作　　者：刘敏强[1] 

机构地区：[1]北京北仪创新真空技术有限责任公司,北京102600

出　　处：《中国仪器仪表》2017年第9期21-23,共3页China Instrumentation

摘　　要：真空仪器设备的在部分航天及军工领域的应用与发展。从真空技术的3个方面——真空获得、真空检测、真空应用简要介绍真空技术目前的发展状况。在真空获得方面介绍低真空泵国内外发展状况,高真空泵方面重点介绍分子泵目前的国内发展状况;真空检测方面介绍我国国产产品的发展状况,以及发展的难点及瓶颈。真空应用方面介绍几个航空航天及军工有代表性的领域应用情况。This paper briefly introduces the current development of vacuum technology in vacuum equipments and vacuum instruments. It focuses on the domestic and international development status of the Rough Pumps and molecular pump as high vacuum pumps in China. The development of the vacuum measuring instrument, the difficulty in the development and the gap between China and foreign countries are pointed out. And the applications of vacuum technology in the fields of aerospace and military industry are briefly introduced.

关 键 词：真空仪器 分子泵 真空应用 

分 类 号：TB75[一般工业技术—真空技术]