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作 者:李俊 刘小勤[2] 吴毅[2] 秦来安 胡露露 沐超 LI Jun LIU Xiaoqin WU Yi QIN Laian HU Lulu MU Chao(School of Environment Science and Optoelectronic Technology, University of Science and Technology of China Hefei 230026, China Key Laboratory of Atmospheric Composition and Optical Radiation, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China)
机构地区:[1]中国科学技术大学环境科学与光电技术学院,安徽合肥230026 [2]中国科学院安徽光学精密机械研究所中国科学院大气成分与光学重点实验室,安徽合肥230031
出 处:《大气与环境光学学报》2017年第5期386-392,共7页Journal of Atmospheric and Environmental Optics
摘 要:针对目前国内尚无自主知识产权的半导体分选机系统的状况,提出了一种基于PLC的智能分选机系统的设计方案。智能分选机系统以工控机为上位机、安川MP2310为下位机,通过伺服驱动器控制伺服电机构成闭环控制系统,实现了精确的位置控制,能够满足半导体芯片分选的精度要求。给出了分选机系统上料部分程序设计的流程图,详细介绍了上料部分的工艺流程,给出了部分上料部分典型PLC程序,解决了工作台示教、芯片快速分选等问题。现场使用表明,该系统设计合理,工作可靠稳定。As there is no independent intellectual property rights for domestic semiconductor sorter system now, a program for designing an intelligent sorting machine control system based on PLC was put forward. The intelligent sorting machine system which puts IPC as the host computer, Yaskawa MP2310 as slave, constitutes closed loop control system through servo driver which controls the servo motor. It not only achieves accurate position control but also meets the accuracy requirements of the semiconductor chip that is sorted. First of all, a flow chart about the loader part was presented, then the process about the loader part was introduced in detail, and some typical PLC program of loader part was given. The most important is that the problems of teaching the table, fast sorting chips were resolved. The system is reasonable, reliable, stable in actual use .
分 类 号:TP273[自动化与计算机技术—检测技术与自动化装置]
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