单晶金刚石氢终端场效应晶体管特性  

Characteristics of H-terminated single crystalline diamond field effect transistors

作　　者：任泽阳 张金风 张进成 许晟瑞 张春福 全汝岱 郝跃 

机构地区：[1]西安电子科技大学微电子学院宽带隙半导体技术国防重点学科实验室,西安710071

出　　处：《物理学报》2017年第20期233-239,共7页Acta Physica Sinica

摘　　要：基于微波等离子体化学气相淀积生长的单晶金刚石制作了栅长为2μm的耗尽型氢终端金刚石场效应晶体管,并对器件特性进行了分析.器件的饱和漏电流在栅压为-6 V时达到了96 mA/mm,但是在-6 V时栅泄漏电流过大.在-3.5 V的安全工作栅压下,饱和漏电流达到了77 mA/mm.在器件的饱和区,宽5.9 V的栅电压范围内,跨导随着栅电压的增加而近线性增大到30 mS/mm.通过对器件导通电阻和电容-电压特性的分析,氢终端单晶金刚石的二维空穴气浓度达到了1.99×10^(13)cm^(-2),并且迁移率和载流子浓度均随着栅压向正偏方向的移动而逐渐增大.分析认为,沟道中高密度的载流子、大的栅电容以及迁移率的逐渐增加是引起跨导在很大的栅压范围内近线性增加的原因.Diamond has been considered as an ultimate semiconductor, which has great potential applications in high power,high frequency semiconductor devices. Up to now, the twodimensional hole gas（2 DHG） induced on the hydrogenterminated diamond surface is used most popularly to form electric conduction in diamond semiconductor at room temperature, due to the obstacle caused by lacking of easily-ionized dopants. A 200-nm-thick single crystalline diamond is grown by microwave plasma chemical vapor deposition on the type-Ib high-pressure high-temperature synthesized diamond substrate. Then the sample is treated in hydrogen plasma atmosphere to achieve hydrogen terminated diamond surface. The sample is characterized by X-ray photoelectron spectroscopy and atomic force microscope. After that, the normally-on hydrogen-terminated diamond field effect transistors are achieved. The device with a gate length of 2 μm delivers a saturation leakage current of 96 mA/mm at gate voltage VGS=-6 V, at which, however, the gate leakage current is too large. The saturation current reaches 77 mA/mm at VGS=-3.5 V with safety. The device shows typical long-channel behavior. The gate voltage varies almost linearly. In the saturation region of the device, the transconductance（gm） increases near-linearly to 30 mS/mm with the increase of the gate voltage in a range of 5.9 V.Analyses of the on-resistance and capacitance-voltage（C-V） data show that the 2 DHG under the gate achieves a density as high as 1.99 × 10^13 cm^-2, and the extracted channel carrier density and mobility are always kept increasing with VGS negatively shifting to-2.5 V. The nearlinearly increasing of gm in a large VGS range is attributed to high 2 DHG density,quite a large gate capacitance（good gate control）, and increased mobility. The relevant researches of improving the carrier mobility in the channel and of finding proper gate dielectrics to improve the forward gate breakdown voltage are underway.

关 键 词：金刚石 氢终端 场效应晶体管 

分 类 号：TN386[电子电信—物理电子学]