一种微构件拉伸测试系统及测试结构设计  

An apparatus for tensile test of micro-structure and design of test specimens by bulk silicon process

作　　者：冯永平[1] 罗华云[1] 

机构地区：[1]南昌大学科学技术学院,南昌330029

出　　处：《应用力学学报》2017年第5期963-968,共6页Chinese Journal of Applied Mechanics

基　　金：江西省高等学校教学改革研究省级课题(JXJG-15-30-3)资助项目

摘　　要：微机电系统(Micro-Electro-Mechanical Systems,MEMS)的力学性能是研究MEMS可靠性的一个重要部分。目前,微结构片外拉伸测试的难点在于如何在实现较高精度的夹持和测试的同时能够较好地控制成本,这是本文着重解决的问题。首先,针对单晶硅各向异性湿法体硅工艺的特点,设计了一种新颖而经济的试样结构,利用力学分析确定其结构尺寸,通过有限元分析验证其合理性;其次,设计了一种简单经济的微结构片外拉伸测试系统;最后,加工出样本并进行准静载拉伸强度测试。结果表明:微梁尺寸增大,拉伸强度降低,同时验证了本装置在微结构拉伸准静载测试中的适用性。Investigation on the mechanical properties of the micro-electro-mechanical systems(MEMS) is an important issue of MEMS reliability. However, owing to the small scale of MEMS structures, it's hard to efficiently control cost and achieve high precision of clamping and testing at the same time, which is the main goal of this work. Firstly, according to the characteristics of wet anisotropic etching technology, an original and economic micro-structure is designed. Mechanical analysis is used to determine the dimensions of the structure, and the ANSYS analysis is applied to verify the reasonableness of the design. Secondly, an economical off-chip tensile test apparatus is designed. Lastly, the specimens are prepared and tested. Results show that the tensile strength decreases as the dimension of the specimen increases, and that this device is suitable for quasi-static tensile tests.

关 键 词：MEMS 拉伸测试 片外拉伸测试装置 拉伸测试试样 

分 类 号：O348[理学—固体力学]