基于多频扫描的硅微谐振压力传感器测试方法  

Testing method of silicon micro resonant pressure sensor based on multi-frequency scanning

作　　者：程波[1,2] 苑伟政 任森[1,2] 王飞[1,2] CHENG Bo YUAN Wei-zheng REN Sen WANG Fei(Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi＇ an 710072, China Key Laboratory of Micro and Nano Electro Mechanical Systems of Shaanxi Province , Northwestern Polytechnical University, Xi＇ an 710072, China)

机构地区：[1]西北工业大学空天微纳系统教育部重点实验室,陕西西安710072 [2]西北工业大学陕西省微/纳米系统重点实验室,陕西西安710072

出　　处：《传感器与微系统》2017年第10期17-19,共3页Transducer and Microsystem Technologies

基　　金：西北工业大学中央高校基本科研业务费资助项目(3102015BJ(II)MYZ24)

摘　　要：为了对硅微谐振压力传感器进行快速、高精度的开环特性测试,提出了一种基于多频扫描的频率特性测试方法。通过数字电路将多个不同频率的扫频信号叠加作为驱动信号,以实现在整个测试频带范围内高效且高精度的频率特性测试。搭建了以现场可编程门阵列(FPGA)为核心的多频扫描测试系统,采用4个正弦扫频信号叠加进行测试,结果表明:多频扫描测试与稳态扫描测试精度基本一致,但测试效率提高了4倍。多频扫描测试方法在保证测试精度的前提下,显著提高了测试效率,能够更好地满足高Q值传感器及其在批量生产过程中的测试需求。For testing silicon micro resonant pressure sensor with high efficiency and precision,a testing method of frequency characteristics based on multi-frequency scanning is presented. Multi-frequency scanning signals are superimposed by digital circuit and act as driving signal to realize frequency characteristic measurement,with high precision and high efficiency. The multi-frequency scanning testing system with FPGA as the core part is built,and 4 sine frequency scanning signal is superimposed. The experimental result shows that the precision of multi-frequency scanning test is basically the same as steady-state scanning test,but it improves the efficiency by 4 times. The multi-frequency scanning test method can greatly improve the testing efficiency on the premise of test precision,and can meet the testing requirements of high Q value sensor as well as its mass production better.

关 键 词：多频扫描 硅微谐振压力传感器 频率特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]