氮气流量对热丝增强等离子体磁控溅射制备CrN_x薄膜组织结构与性能的影响  

Microstructures and Tribological Properties of CrN_x Coatings Synthesized by Plasma Enhanced Magnetron Sputtering

作　　者：张鑫[1] 周艳文[1] 高健波[1] 郭媛媛[1] 解志文[1] 吕哲 

机构地区：[1]辽宁科技大学表面工程研究所,鞍山114051

出　　处：《真空科学与技术学报》2017年第10期984-990,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(51372109;51672119;51401201;51502126);辽宁省教育厅校企成果转化项目(601009817-01);辽宁省百千万人才项目(201571)

摘　　要：采用热丝增强等离子体磁控溅射技术在SKD61钢基体上制备了CrN_x薄膜,并分析研究了不同氮气流量对薄膜相结构、组织形貌、粗糙度、厚度、耐磨性、膜基结合力以及纳米硬度和弹性模量的影响。结果表明:在较宽的氮气流量变化范围内可制备出厚度均匀、结构致密、高硬度及高耐磨性的CrN_x薄膜。随氮气流量增加,薄膜由Cr2N及CrN双相组成转变为CrN单相。由于复杂相及相取向的存在,氮气流量为90 mL/min的CrN_x薄膜内应力最大,膜基结合力最低。CrN_x薄膜使SKD61钢的纳米硬度、弹性模量及耐磨性能均大幅提高,最高纳米硬度及弹性模量分别达36 GPa,477 GPa。通过对材料韧性的综合评价,氮气流量为75 mL/min条件下所制得的以Cr_2N相为主的薄膜的韧性最佳。The CrNx coatings were synthesized by hot wire plasma enhanced magnetron sputtering （PEMS） on substrate of SKD61 steel.The influence of the N2 flow-rate on the microstructures and tribological properties was in-vestigated.The results show that the N2 flow-rate has a major impact.To be specific,as the N2 flow-rate increased, the co-existed Cr2 N phase turned into CrN phase （ from 75 to 105 mL/min）;the nano-hardness and Young＇ s modu-lus of the compact uniform CrNx coatings changed in an increase-decrease mode,peaking to 36 and 477 GPa,re-spectively;the surface roughness decreased,accompanied by the an increase of interfacial adhesion from 30 N at 90 mL/min to 48.0 N at 105 mL/min.A flow-rate of 90 mL/min resulted in the highest internal stress and the lowest interfacial adhesion,because of the complicated phases and preferential grain growth orientations.The dominated Cr2 N phase explained the toughest CrNx coatings deposited at 75 mL/min.

关 键 词：热丝增强等离子体磁控溅射 CRNX薄膜 氮气流量 结构 性能 

分 类 号：TB741.34[一般工业技术—材料科学与工程]