沟槽型X射线两次衍射单色器研究  

Study on Channel-cut Type X-ray Monochromator with Two Times Diffraction

作　　者：何健[1] 徐中民[1] 宋丽[1] 杨铁莹[1] 王纳秀[1] 王劼[1] 

机构地区：[1]中国科学院上海应用物理研究所,上海201800

出　　处：《原子能科学技术》2017年第11期2085-2091,共7页Atomic Energy Science and Technology

基　　金：国家自然科学基金资助项目(11175243)

摘　　要：为获得高能量分辨率、高准直的同步辐射光,应用X射线衍射动力学原理,并依据上海光源小角散射线站光学参数,设计并加工了两次衍射的单晶硅(111)面沟槽型单色器。测量了两反射面平行度、斜切角及摇摆曲线,并对摇摆曲线的测量值进行了误差分析。理论模拟与实验数据对比分析显示:有效减小晶体加工过程中的残余应力导致的晶格畸变、改善晶体形貌、调整斜切角与增加衍射级次可降低晶体的衍射角宽,进而提高出射光的准直性和能量分辨率。经计算,在同步辐射光能量为10keV条件下,单晶硅(111)面沟槽型单色器的本征能量分辨率为1.452×10^(-4)。In order to obtain high energy resolution and high collimation synchrotron radiation light, a channel-cut type single-crystal silicon （111） monochromator with two times diffraction was designed based on the optical parameters of small-angle scattering station in SSRF （Shanghai Synchrotron Radiation Facility）. X-ray diffraction dynamics was used to analyze the optical properties of the monochromator. The parallelism, asymmetrical angle and rocking curve were measured, and the error of rocking curve was analyzed based on test value. By comparing the analog value with experimental measurement, the results show that reducing the residual stress in the process which causes the lattice damage, improving the quality of crystal morphology, adjusting asymmetrical angle, and increasing the number of diffraction, can make the intrinsic diffraction width of crystal narrower, and as a result, higher resolution and more collimated synchrotron radiation. All of the results prove that the channel-cut type monochromator made of single-crystal silicon （111） has an intrinsic energy resolution of 1. 452 × 10-4 at 10 keV.

关 键 词：X射线光学 高分辨率 两次衍射 沟槽型单色器 摇摆曲线 

分 类 号：O484.1[理学—固体物理] TH744[理学—物理]