双层厚膜结构改善气敏元件灵敏度和选择性研究  

Study on sensitivity and selectivity of gas sensor with double layer thick film structure

作　　者：张庞[1] 梁鸿东[1] 刘志宇[1] 傅刚[1] 彭智伟[1] 

机构地区：[1]广州大学物理与电子工程学院,广东广州510006

出　　处：《传感器与微系统》2017年第11期35-37,共3页Transducer and Microsystem Technologies

基　　金：广州市属高校科研计划资助项目(2012A090)

摘　　要：研究了厚膜印刷技术制备的双层膜结构气敏元件的灵敏度和选择性。测量结果表明:在二氧化锡(SnO_2)单层膜下再添加一层纳米三氧化钨(WO_3)材料厚膜,可以提高气敏元件对酒精、丙酮、甲醛、甲苯还原气体的灵敏度和选择性。当浓度为900×10^(-6)时,将SnO_2覆盖在WO_3之上形成双层膜时,较两种材料对应的单层膜灵敏度均有所提升。因此,双层厚膜结构为改善元件的灵敏度和选择性提供了一种可行的方法。初步认为,双层膜的作用与膜的上、下排列顺序有很大的关系,也与双层界面间由于扩散效应所形成的过渡层有关。The sensitivity and selectivity of bilayer membrane structure gas sensor prepared by thick film printing technology is studied. The measurement results show that the sensitivity and selectivity of ethanol,acetone,formaldehyde,toluene and other reducing gases can be improved by adding another layer of nano material thick film under the SnO_2 monolayer film. When the concentration is 900 × 10^（-6）,SnO_2 monolayer of ethanol and acetone sensitivity are 28.1 and 24.7,the sensitivity of WO_3 for ethanol and acetone are 8.9 and 11.3,When the SnO_2 is covered on the WO_3 to form a double layer film,the corresponding sensitivity is improved to 43.5 and 52.1.Therefore,the double layer thick film structure provides a feasible method to improve the sensitivity and selectivity. It is believed that the action of the bilayer membrane has a great relationship with the order of the top and bottom alignment of the membrane,and it is also related to the transition layer formed by the diffusion effect.

关 键 词：气敏元件 二氧化锡 双层厚膜 选择性 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]