印刷电路板换热器换热槽道的喷淋蚀刻实验  

Experimental Study on Spray Etching of Printed Circuit Heat Exchanger Channels

作　　者：辛菲[1] 马挺[1] 王秋旺[1] 

机构地区：[1]西安交通大学热流科学与工程教育部重点实验室,西安710049

出　　处：《工程热物理学报》2017年第12期2674-2678,共5页Journal of Engineering Thermophysics

基　　金：国家自然科学基金资助项目(No.51120165002)

摘　　要：印刷电路板换热器(printed circuit heat exchanger,简称PCHE)作为一种新型换热器紧凑度高,能在高温高压等恶劣条件下进行传热。利用化学蚀刻技术,能蚀刻出微米至毫米量级的PCHE换热单元通道.为了能优化蚀刻过程、提高蚀刻速率、减少黑色杂质的生成以蚀刻出高质量的换热单元微通道,本文采用正交喷淋蚀刻法研究了喷淋压力、蚀刻液化学组成成分及浓度、蚀刻液温度对201不锈钢蚀刻速率、侧蚀量及表面粗糙度等蚀刻质量的影响。通过正交蚀刻试验,在研究的水平范围内,得到最佳蚀刻参数为喷淋压力0.20 MPa、蚀刻液温度35℃、FeCl_3 350g·L^(-1)、H_3PO_4 1.5mol/L,其有利于实现PCHE换热单元通道低成本、高效率、可控的加工.Printed circuit heat exchanger （PCHE）, as a new type of high compact heat exchanger, can work under high-temperature and high-pressure conditions to transfer great heat. Using chemical etching technology can etch PCHE heat transfer unit channels from micron to millimeter level. In order to optimize etching process conditions, improve the etching rate and reduce the influence of black sediment for etching quality, this paper adopts orthogonal spray etching method to study the influence of spray pressure, etchant components and their concentration, etching temperature on the 201 stainless steel etching quality of the etching rate, lateral erosion and surface roughness. Through orthogonal spray etching experiment, we have obtained the optimum combination conditions of each factor in the setting level, and that is spray pressure 0.25 MPa, etching temperature 35℃, FeCl3 concentration 350 g·L^-1, H3PO4 concentration 1.5 mol/L in the etchant, which is beneficial to realize the low-cost, high-efciency and controllable process of PCHE heat transfer unit production.

关 键 词：印刷电路板换热器(PCHE) 正交法 喷淋蚀刻试验 蚀刻因素 蚀刻质量 

分 类 号：TG178[金属学及工艺—金属表面处理] TQ138.1[金属学及工艺—金属学]