光栅尺测量精度误差补偿系统研究  

Research on the Error Compensation System of Linear Encoder'S Measuring Precision

作　　者：黄明辉[1] 王晗[1] 陈新[1] 陈新度[1] 李彬[1] 

机构地区：[1]广东工业大学广东省微纳加工技术与整备重点实验室,广州510006

出　　处：《组合机床与自动化加工技术》2017年第12期81-84,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：广东省科技计划(2013B011301005);东莞市产学研项目(2013509109101);国家自然科学基金(51305084)

摘　　要：文章主要研究影响光栅尺测量精度的因素,探索提高测量精度的途径。通过研究影响光栅尺测量精度的因素分析了其静态误差模型;然后,通过设计可调的光栅尺误差检测平台并结合优化的测量方案对各个测量点进行了大量的误差检测,并分析了各个测量点测量误差的统计特性,再对检测结果进行正态分布检验,获得了较为准确真实的光栅尺测量误差曲线,验证了其静态误差模型;最终在光栅尺数显系统分别采用全程线性补偿及分段线性补偿方法对光栅尺测量误差进行修正。实验结果经第三方计量机构检测表明:经一次全程线性补偿后,在直线光栅尺90mm测量长度内,测量精度由0~19.42μm提高到-3.26~1.32μm,经二次分段线性补偿后,测量精度提高到-1.453~0.9332μm。This paper mainly studies the influencing factors of linear encoder＇s measuring precision,exploring the method to improvemeasuring precision of linear encoder. First,by researching the influencing factors of linear encoder＇s measuring precision,the static error models of linear encoder is analyzed. Then,each measuring point is measured by designing adjustable install platform of linear encoder and combing optimized measuring plan,based on the statistical property of measuring error of each measurement point,a normal distribution test is conducted,to get relatively real and accurate error curve of linear encoder,and verified the static error models of linear encoder. Finally,a method of whole linear compensation and segment linear compensation is separately conducted in digital readout system to correct the measuring error of linear encoder. The experimental results tested by the third party shows that the accuracy is improved from 0~ 19. 42 μm to-3. 26 ~ 1. 32 μm with the whole linear compensation,and improved to-1. 453 ~0. 9332 μm with the segment linear compensation in a measurement length of 90 mm.

关 键 词：直线光栅尺 误差补偿 精度检测 数显系统 

分 类 号：TH165[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]