CrAlYN纳米多层薄膜的微观结构和抗高温氧化性能研究  

Synthesis and Mechanical Properties of Magnetron Sputtered CrAlYN Nano-Multilayers

作　　者：王宇星 楼白杨[1] 巫少龙 Wang Yuxing;Lou Baiyang;Wu Shaolong(Faculty of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310032 , China;Faculty of Mechanical and Electrical Engineering, QuzhouCoUege of Technology, Quzhou 324000, China)

机构地区：[1]浙江工业大学材料科学与工程学院,杭州310032 [2]衢州职业技术学院机电工程学院,衢州324000

出　　处：《真空科学与技术学报》2017年第11期1075-1079,共5页Chinese Journal of Vacuum Science and Technology

基　　金：浙江省教育厅科研项目资助(Y201738020)

摘　　要：采用非平衡磁控溅射离子镀技术在M2工具钢和单晶Si表面沉积不同Y含量的Cr Al YN纳米多层薄膜,并在静态空气中进行1000℃的高温氧化实验。透射电子显微镜、扫描电镜、X射线衍射、能量色散谱、纳米压痕和划痕实验等研究结果表明:Cr Al YN纳米多层薄膜呈现fcc晶体结构,调制周期为Cr N/YN+Al N/Cr N/Al N。Cr Al YN纳米多层薄膜的抗高温氧化性能随着Y含量提高呈现先提高后下降的趋势,Y含量为1.13%(原子比)时,薄膜表现出最优的力学性能,当Y含量增加到2.67%时,薄膜的力学性能明显下降。The CrAlYN nano-multilayered coatings were deposited on substrates of M2 high speed tool steel and Si wafers by unbalanced magnetron co-sputtering. The impact of the Y-doping on the mechanical properties and high temperature oxidation resistance of the coating was investigated with transmission electron microscopy,scanning electron microscopy,energy dispersive spectroscopy and X-ray diffraction. The results show that the Y-doping significantly affected the high-temperature oxidation resistance of the coatings. To be specific,as the Y-content in the periodic Cr N/YN ＋ Al N/Cr N/Al Nnano-multilayered,fcc-structured coatings increased,the oxidation resistance,evaluated at 1000℃ for 2 h,changed in an increase-decrease mode. In addition,we found that at 1. 13%（ at） of Y,the coatings exhibited the best mechanical properties; however,at 2. 67% of Y,the mechanical properties of the coatings drastically deteriorated.

关 键 词：CrAlYN纳米多层薄膜 磁控溅射 微观结构 高温氧化 

分 类 号：TG174[金属学及工艺—金属表面处理]