基于四螺旋梁-质量块的MEMS压电能量采集器  

MEMS Piezoelectric Power Generator Based on the Four-Helical Cantilever Beam-Mass Block

作　　者：高翔[1] 石树正 徐方良 何剑[1] 穆继亮[1] 杨玉华[1] 丑修建[1] Gao Xiang;Shi Shuzheng;Xu Fangliang;He Jian;Mu Jiliang;Yang Yuhua;Chou Xiujian(Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, China;College of Mechanical Engineering, Hebei University of Architecture and Engineering, Zhangjiakou 075000, China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]河北建筑工程学院机械工程学院,河北张家口075000

出　　处：《微纳电子技术》2018年第1期32-37,62,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51422510,51675493,61471326);山西省青年科技研究基金资助项目(201601D021064)

摘　　要：设计了一种四螺旋悬臂梁-质量块结构的压电能量采集器,将环境振动能转换为电能。采用有限元分析软件（COMSOL Multiphysics）建立结构模型,仿真结构固有频率,计算不同振动频率下器件的位移、应力、应变和电势以及不同加速度下的电压输出,仿真得到结构的一阶谐振频率为102 Hz,为后期测试提供指导。利用溶胶-凝胶工艺完成锆钛酸铅（PZT）压电薄膜的制备,通过微电子机械系统（MEMS）工艺和引线键合工艺完成器件结构制造,将四个螺旋梁上的压电单元串联以实现输出最大化。性能测试结果表明：器件固有频率为110 Hz,输出电压随加速度的增大而线性增大,3g加速度下输出电压峰峰值为140 m V。A piezoelectric power generator based on the four-helical cantilever beam-mass block was designed to convert environmental vibration energy into electrical energy. The finite element analysis software（COMSOL Multiphysics） was used to build the structural model,simulate the inherent frequency of the structure,calculate the displacement,stress,strain and potential of the device under different vibration frequencies and the output voltage under different accelerations. The simulation results show that the firstorder resonant frequency of the structure is 102 Hz,providing a guidance for the later test. The Pb Zr0.53Ti0.47O3（PZT） piezoelectric thin film was fabricated by the sol-gel method. The device structure was fabricated through the micro-electromechanical system（MEMS） process and wire bonding process. The piezoelectric elements on the four helical beams were connected in series to maximize the output. The performance test results show that the inherent frequency of the device is 110 Hz,the output voltage increases linearly with the increase of the acceleration,and the output voltage peak-to-peak value is 140 mV at 3 g acceleration.

关 键 词：微电子机械系统(MEMS) 压电效应 锆钛酸铅(PZT) 能量采集器 COMSOL 

分 类 号：TN384[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]