闪耀透射光栅衍射规律的分析和验证  

Analysis and verification of diffraction rules of blazed transmission grating

作　　者：黄元申[1,2,3] 过军军 盛斌 HUANG Yuan-shen;GUO Jun-jun;SHENG Bin(School of Optical-electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;Shanghai Key Laboratory of Modern Optical System, Optical Instrument and Systems Engineering Centre of the Ministry of Education, Shanghai 200093, China;Shanghai Institute of Optical Instruments, Shanghai 200093 ,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]上海市现代光学系统重点实验室教育部光学仪器与系统工程中心,上海200093 [3]上海光学仪器研究所,上海200093

出　　处：《光学精密工程》2017年第12期3012-3019,共8页Optics and Precision Engineering

基　　金：国家重点研究发展计划资助项目(No.2016YFB1102303);国家自然科学基金资助项目(No.61378060);国家重大仪器专项(No.2016YFF0101904)

摘　　要：基于标量理论研究了不同槽形角,不同刻线密度的透射式闪耀光栅对使用波段的影响,推导了闪耀透射光栅的衍射光能量分布规律。分析证明了透射闪耀光栅在衍射能量最强方向上衍射光的衍射角与入射光的入射角之间的关系满足Snell定律。给出了入射角、衍射角与槽形角之间的关系式,研究了不同刻线密度和槽形角条件下衍射光能量分布的规律。对闪耀透射光栅进行了测量和比较,结果表明:已有闪耀透射光栅测量的结果与理论计算数据相吻合。制备了聚二甲基硅氧烷(PDMS)可调谐闪耀透射光栅,应用研究的理论公式测量了该闪耀透射光栅在拉伸与自由状态下的闪耀波长和光栅刻线密度,结果显示其波长测量误差在5nm以内。拟合了光栅的等效槽形,验证了实时监测PDMS光栅槽形和刻线密度随拉力大小变化的规律。Based on the scalar theory,the influence of the blazed transmission grating with different groove angles or different groove densities on the used wavelength was researched and the energy distribution of the diffraction light of the blazed transmission grating was deduced.It was concluded that the relationship between the diffraction angle and the incident angle of the diffracted grating in the diffraction direction with the strongest energy could satisfy the Snell’s law.The relationship among the angle of incidence,diffraction angle and groove angle was given,and the energy distribution law of thediffracted light at different groove densities and groove angles was studied.Then,the blazed transmission gratings were measured.It is shown that the characteristics of the existing blazed transmission gratings are consistent with that of theoretical calculation.A polydimethylsiloxane（PDMS）period-tunable blazed transmission grating was fabricated.Then,the blazed wavelength and groove density of the PDMS blazed transmission grating were measured in both stretched and free state by using the deduced formula.The results show that the measurement error of the wavelength is within 5 nm.The equivalent groove profile of the grating was fitted,which verifies the law that groove profile and groove density of the PDMS grating are changed with the tension changes in the real-time monitoring.

关 键 词：透射光栅 闪耀光栅 衍射效率 闪耀角 闪耀波长 

分 类 号：O436.1[机械工程—光学工程]