中国半导体设备业的状况研究  

Status of China's Semiconductor Equipment Industry

作　　者：王龙兴 WANG Longxing(Shanghai integrated circuit industry association, Shanghai 201203, China.)

机构地区：[1]上海市集成电路行业协会,上海201203

出　　处：《集成电路应用》2017年第12期54-58,共5页Application of IC

基　　金：上海市软件和集成电路产业发展专项基金(2016.160505)

摘　　要：在中国国内,半导体设备业和半导体材料业通称为半导体支撑业。根据中国电子专用设备工业协会的估测,2016年国产半导体设备的销售规模为57.0亿元,同比增长20%。近年来,在国内集成电路产业持续快速发展的带动下,国内半导体设备业呈现出高增长的势头。在国家重大科技02专项和各级地方政府科技创新专项的大力支持下,多种先进制造设备开始替代进口设备,在国内集成电路大生产线上运行和使用。In China, the semiconductor equipment industry and semiconductor materials industry are generally known as semiconductor support industry. According to the estimates from China Electronic Equipment Industry Association, in 2016 the sales scale of domestic semiconductor equipment was 5 billion 700 million yuan, an increase of 20%. In recent years, with the continuous and rapid development of the domestic IC industry, the domestic semiconductor equipment industry has shown a high growth momentum. With the support of the national science and technology special project 02 and the local government scientific and technological innovation special projects, a variety of advanced manufacturing equipment began to replace imported equipment, running and using in the domestic integrated circuit production line.

关 键 词：集成电路制造 半导体设备 替代进口 

分 类 号：TN405[电子电信—微电子学与固体电子学] F426.63[经济管理—产业经济]