考虑温度影响的高灵敏度微压力传感器  

High Sensitivity Micro Pressure Sensor Considering the Effects of Temperature

作　　者：乔晶[1] 陈德媛[1] 段亚丽 梁吴燕 谷云斌 

机构地区：[1]南京邮电大学电子科学与工程学院,南京210046

出　　处：《半导体光电》2017年第6期806-809,867,共5页Semiconductor Optoelectronics

基　　金：江苏省自然科学基金项目(BK20160909;20130874);江苏省研究生创新项目(YLX_0801;SJLX15_0376);江苏省高校教育基金项目(JB510025);南京邮电大学校内项目(NY214051;215084)

摘　　要：提出了一种考虑温度影响的基于光子晶体的微压力传感器,传感器由微压力传感和温度传感两部分构成,其中微压力传感部分测量的是所处温度环境下的压力值。两部分传感器均利用波导和腔的耦合实现带阻滤波功能,根据带阻滤波器的模式在所处温度下线性红移,分别计算相应的温度值和该温度下的压力值,并通过热光效应和热膨胀效应计算出温度对器件材料折射率的影响,从而得到真实的微压力。文中对结构参数进行了优化设计,实现了1.33nm/μN的微压力灵敏度。In this paper,a micro pressure sensor based on photonic crystals considering temperature influence is proposed,which is composed of two parts of micro-pressure sensor and temperature sensor.The micro-pressure sensor measures the pressure in the temperature environment.Both parts of the sensors use the coupling of waveguide and cavity to achieve the function of band rejection filter.According to the linear redshift of rejection model,the corresponding temperature value and the pressure value at the temperature were calculated,and the influence of the temperature on the refractive index of the device was calculated by the thermo-optic effect and the thermal expansion effect,then the real micro pressure was obtained.In this thesis,the structural parameters were optimized to achieve 1.33 nm/μN micro-pressure sensitivity.

关 键 词：光子晶体 压力传感器 温度 悬臂 

分 类 号：O472[理学—半导体物理]