圆光栅测角传感器在线自校准系统研制与实验  

Development and experiment of online self-calibration system for circular grating angle sensor

作　　者：张文颖 劳达宝[2,3] 周维虎 朱浩然[4] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中国科学院光电研究院,北京100094 [3]中国科学院大学,北京100049 [4]长春理工大学电子信息工程学院,吉林长春130022

出　　处：《红外与激光工程》2018年第1期212-217,共6页Infrared and Laser Engineering

基　　金：国家重大科学仪器设备开发专项(2016YFF0100700);青岛市光电智库联合基金(GDZK-2017-05)

摘　　要：为了解决测角系统在实际应用中的在线校准问题,设计了一种圆光栅测角传感器在线自校准系统。基于圆封闭原则和傅里叶级数的性质,建立了测量值与单读数头误差之间的关系,实现单读数头自校准。该自校准系统由读数头、玻璃圆光栅、单轴转台和多通道采集控制系统组成。实验结果表明,测角传感器自校准系统的单读数头测量精度为±5.90″,接近于借助外部参考标准的谐波补偿方法后的精度,系统测量重复性小于0.76″。自校准测量系统可实现圆光栅测角传感器在线校准的同时,满足了精密测量领域对精度和可靠性的要求。In order to solve the online calibration problem of the angle measuring system in practical application, an online self-calibration system of circular grating angle sensor was designed. Based on the principle of round closure and Fourier series, the relationship between the measured value and the error of single reading head was established, and the single reading head self-calibration was realized. The self-calibration system consisted of a reading head, a glass circle grating, a single-axis turntable and a multi-channel acquisition control system. The experimental result shows that the accuracy of the single reading head of the self-calibration system is ±5.90＂, which is close to the accuracy of the harmonic compensation method with external reference standard, the measuring repeatability is less than 0.76＂. Self-calibrated measurement system could realize the online calibration of circular grating angle measuring system, which meets the requirement of precision and reliability in precision measurement field.

关 键 词：角度传感器 圆光栅 自校准 

分 类 号：TH74[机械工程—光学工程]