不同过渡层对PMMA基底沉积ZAO薄膜特性的影响  

Influence of different intermediate layers on properties of Al-doped ZnO thin films deposited on PMMA substrates

作　　者：郭婷婷 孔林涛[1] 郭慧梅[1] 武永鑫 

机构地区：[1]天津科技大学理学院,天津300457 [2]中国大唐集团科学技术研究院有限公司新能源技术研究所,北京100040

出　　处：《功能材料》2018年第1期1204-1208,共5页Journal of Functional Materials

基　　金：天津科技大学校基金资助项目(20323)

摘　　要：采用磁控溅射技术,分别使用SiO_2、SiON、Al2O_3、AlON作为过渡层,在有机玻璃(PMMA)基底上制备了ZAO薄膜。利用紫外-可见光谱仪、X射线衍射仪(XRD)、原子力显微镜(AFM)和划痕仪对不同过渡层上制备的ZAO膜层的光电特性、薄膜结构、表面形貌及附着力进行了研究。结果表明,不同的过渡层对400~800nm波长范围内的光的透过率影响不大,在不同过渡层上制备的ZAO薄膜均展现了c轴择优取向。过渡层的添加不仅提高了ZAO薄膜的表面粗糙度和电阻,而且进一步提升了ZAO薄膜与PMMA基底的附着力。The ZAO thin films are deposited on PMMA substrates by using magnetron sputtering technology.The SiO2,SiON,Al2O3,AlON thin films are used as intermediate layers to improve the adhesion of PMMA substrate and ZAO layer.The UV-Vis spectroscopy,X-ray diffraction（XRD）,atomic force microscope（AFM）and scratch track are used to study the optical properties,crystal structure,surface appearance and adhesion.The results show that the intermediate layer does not have a significant impact on transmittance at 400-800 nm and the ZAO layer deposited on PMMA substrate with different intermediate layer exhibits the c axis preferred orientation.Adding an intermediate layer between PMMA substrate and ZAO layer improves not only the surface roughness and resistivity,but also the adhesion between ZAO film and PMMA substrate.

关 键 词：ZAO薄膜 过渡层 电阻率 透过率 附着力 

分 类 号：O484[理学—固体物理]