基于激光干涉技术的大尺寸绝对测量方法的研究  

Research on Large Size Absolute Measurement Method Based on Laser Interference Technology

作　　者：刘红光[1] 路瑞军[1] 崔尧尧[1] 冉勇[1] 李凌梅[1] 马艺清 

机构地区：[1]天津市计量监督检测科学研究院,天津300192

出　　处：《测控技术》2018年第1期107-109,124,共4页Measurement & Control Technology

基　　金：天津市市场和质量监督管理委员会2016年度科技项目(2016-W01)

摘　　要：大型工件在制造过程中,面临着各式各样的检测任务,大尺寸测量技术成为现代测试技术的一个越来越重要的分支,为提高大尺寸工件静态几何量的检测精度,将激光干涉仪与传统测长机相结合,提出两种基于激光干涉技术的大尺寸高精度的绝对测量方法。通过对两种测量方法的不确定度理论分析和实验比对,验证方法的准确度和可行性。一方面激光干涉仪传统的动态测量转换为高精度的静态量检测,拓展了激光干涉仪的应用领域,同时弥补了测长机在绝对测量能力方面的不足,提高了测长机的测量精度和检测效率。In the process of manufacturing, large size workpiece is faced with a variety of detection tasks, large size measurement technology is becoming a more and more important branch of modern testing technology. In order to improve the static geometry precision of large size workpiece, two kinds of large size and high precision absolute measurement methods based on laser interferometry were put forward by combining the laser interferometer with the traditional length measuring machine. Through the theoretical analysis and experimental comparison of measurement uncertainty, the accuracy and feasibility of the methods were validated. The dynamic measurement of the traditional laser interferometer is converted into a high precision static testing, which not only expands the application field of the laser interferometer, but also improves the measuring accuracy and detection efficiency of the length measuring machine.

关 键 词：测长机 激光干涉仪 绝对测量 大尺寸测量 不确定度 

分 类 号：TB92[一般工业技术—计量学]