原子层沉积Al_2O_3纳米管弯曲模量的原位研究  

In situ study on bending modulus of Al_2O_3 nanotubes prepared by atomic layer deposition

作　　者：孙成东秀 马晋遥 杨丽珍[1] 陈强[1] 张跃飞[2] 

机构地区：[1]北京印刷学院等离子体物理及材料研究室,北京102600 [2]北京工业大学固体微结构与性能研究所,北京100124

出　　处：《电子显微学报》2018年第1期1-7,共7页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.11374027)

摘　　要：本文使用原子层沉积技术以及模板法制备了厚度、成分和结构精确可控的氧化铝纳米管,结合SEM、TEM、SAED和XPS分析,可知所得为非晶态氧化铝纳米管状结构且薄膜致密无针孔,沉积速率为0.11 nm/cycle,实现了纳米管壁厚在纳米尺度精确可控制备。进一步使用自主设计的SEM/SPM(扫描电子显微镜/扫描探针显微镜)联合测试系统,对氧化铝纳米管进行了原位三点弯曲实验研究。结果表明外半径在50 nm左右的氧化铝纳米管的杨氏模量范围在400~600 GPa之间,且杨氏模量值随着纳米管壁厚的增大而递减。Alumina nanotubes with precisely controllable thickness,composition and structures were prepared by atomic layer deposition and template method. Based on the SEM,TEM,SAED and EDS analysis results,we found what we obtained are the amorphous alumina nanotube structure whose film is dense without pinholes,with the deposition rate of 0. 11 nm/cycle,and therefore the thickness of nanotubes can be controlled accurately at nanometer scale. Then we use self-designed SEM/SPM（ scanning electron microscope/scanning probe microscope） combined test system to carry out the in-situ three-point bending experiments on alumina nanotubes. The results show that when the outer radius is about 50 nm,the young＇s modulus of the alumina nanotubes is in the range of 400 GPa to 600 Gpa and decreases with the increase of the wall thickness.

关 键 词：氧化铝纳米管 原子层沉积 SEM/SPM联合测试系统 杨氏模量 三点弯曲 

分 类 号：TB383[一般工业技术—材料科学与工程] TG115.215.3[金属学及工艺—物理冶金]