JSM-6700F冷场发射扫描电子显微镜常见故障分析与排除  

Analysis and Elimination of Common Faults of JSM-6700F Cold Field Emission Scanning Electron Microscope

作　　者：苗壮[1] 田弋纬[1] 李鹏[1] 

机构地区：[1]西北有色金属研究院材料分析中心,西安710016

出　　处：《西安文理学院学报（自然科学版）》2018年第1期97-99,共3页Journal of Xi’an University(Natural Science Edition)

摘　　要：以JSM-6700F冷场发射扫描电子显微镜为例,介绍了在实际工作用遇到的几例常见故障现象及原因,详细阐述了样品台控制系统、冷却系统、真空系统等方面故障的处理方法,简要介绍了日常维护的操作事项,强调了细致的日常维护和及时的故障排除是确保电镜处于良好工作状态的关键.In this paper, by taking the JSM-6700F cold field emission scanning electron micro- scope as an example, several common failures and causes analysis in practical work are intro- duced. The treatment methods of faults in sample table control system, cooling system, vacuum system and so on are elaborated in detail. A brief introduction to the operation of daily mainte- nance is briefly introduced. It is emphasized that careful routine maintenance and timely troubleshooting are the key to ensure the ~ood workin~ condition of the electron microscope.

关 键 词：扫描电镜 故障排除 冷却系统 真空系统 

分 类 号：TN16[电子电信—物理电子学]